An orthogonal axis type speed reducer (6) as a pre speed reducer is placed in front of a post speed reducer (26).

If the primary velocity location information is available this is used, if not then one of the secondary or tertiary velocity signals is used.

output shaft speed sensor spacer

The primary phase velocity of the primary signal proceeding through the primary line is different from the secondary phase velocity of the secondary signal proceeding through the secondary line.

An effective mass moment of inertia of the secondary side, which inhibits a change of a rotation speed of the secondary side, is dependent on the rotation speed.

A gear train (46) reduces the speed of the secondary shaft (54).

the stress as a function of the logarithm of the secondary creep rate

In the Master-Slave Mode, a slave pump is controlled based upon the sensed speed of the master pump.

The gearbox has an input shaft and an output shaft connected to the pivot arms.

The ratio of the Primary Cleavage Ratio to the Second Cleavage Rate of the protease is calculated.

An orthogonal axis type speed reducer (6) as a pre speed reducer is placed in front of a post speed reducer (26).

If the primary velocity location information is available this is used, if not then one of the secondary or tertiary velocity signals is used.

In a preferred embodiment the secondary positioning circuit estimates the speed of the user by detecting a speed related vibration.

The rate of deformation of the primary chamber (40) exceeds the flow rate into the secondary chamber (50), thereby providing a cushioning effect.

A secondary oxidizer lowers the static etch rate of the tungsten CMP solution.