A cluster tool has a transfer chamber, and a load lock chamber.

through one or more lock chambers of a lock, leaving at least one open

Airlock entry must be through an airlock which is a chamber isolated from the laboratory.

The apparatus includes a load lock chamber and a processing chamber coupled to the load lock chamber.

Embodiments of the invention include a heated load lock chamber.

Entry to lab via airlock

The two flaps (2, 7) form a sluice.

Entry to lab via airlock [2]

A method and apparatus for heating a loadlock to inhibit the formation of contaminants within the loadlock.

In order to save heating and pressure energy, the oven has a preliminary air lock, a main chamber and a discharge air lock.

The invention relates to a lock device (10, 10') having at least one individual lock (11) for the insertion of strip material (2).

In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein.

The present invention relates to a lock that includes at least one closable opening that facilitates the flooding and/or draining of the lock.

An introductory flooding chamber (5, 6) is provided at the entry to the caisson, and a bagging machine constitutes the extraction chamber.

A shower unit comprising a shower stall (2) and a vestibule (3) with a first frame defining an access opening (7) to the vestibule (3) and a second frame defining a communication opening (9) between said vestibule (3) and said shower stall (2).