The energy beam could, for example, be a laser beam or an electron beam.

The cathode includes an electron emitter assembly for emitting a beam of electrons during tube operation.

An electron beam recording device and method have control means and beam regulation means.

Electron beam exposure data of first type of pattern is not corrected while electron beam exposure data of second type of pattern is corrected (S603).

The present invention takes advantage of the electron scatter that occurs when electron beam is applied onto a surface.

The bremmsstrahlung photons can be generated with an electron beam (37) and an x-ray converter (32).

The next step is to create a nanometer-scale photovoltaic device.

Such a carbon structure can be exposed to a beam of electrons to compensate for extrinsic doping of the carbon.

Disclosed is a positive resist composition for manufacturing an MEMS by using an electron beam.

General knowledge of how a focused electron beam interacts with materials

A technology based on the emission of a beam of electrons

The vapor of the sample is bombarded by a stream of high energy electrons.

The gun fires an electron beam through an anode, then through two magnetic lenses, and then the electron detector.

All of them use a laser for the energy source, except for Arcam, which uses an electron beam.

They showed that a beam of electrons scattered by a crystal produces a diffraction pattern characteristic of a wave.