In yet another embodiment of the present invention, the thermal annealing step may include a rapid thermal anneal (RTA), a furnace anneal, a laser anneal or a spike anneal.

Fast annealing is less expensive than conventional furnace annealing, and can achieve higher throughput at lower costs.

The impurities are then diffused into the active regions by standard processes such as rapid thermal anneal (RTA) or furnace anneal.

The germanium implant is then followed by a short time, a low temperature furnace anneal.

The impurities are then diffused into the active regions by standard processes such as rapid thermal anneal (RTA) or furnace anneal.

The noble gas implant is followed by a short time, low temperature furnace anneal which stabilizes the implanted regions.

A mechanically resonant marker comprises a strip of magnetic glassy metal alloy that has been annealed in a furnace for a predetermined time at a plurality of temperatures.

In yet another embodiment of the present invention, the thermal annealing step may include a rapid thermal anneal (RTA), a furnace anneal, a laser anneal or a spike anneal.

Fast annealing is less expensive than conventional furnace annealing, and can achieve higher throughput at lower costs.

Annealing (17) of the roasted product improves the resultant magnetic susceptibility.

The impurities are then diffused into the active regions by standard processes such as rapid thermal anneal (RTA) or furnace anneal.

The apparatus may further include an annealing furnace for annealing the glass sheet.

The germanium implant is then followed by a short time, a low temperature furnace anneal.

A furnace roll (14) for transferring steel strips from an annealing furnace has several spaced rings along the body of the roll.

Annealing is performed in the annealing chamber (2) of the annealing furnace (1) under a protective gas.