The pump shaft and pump member may be parts of a dry pump.
The hydrofluoric acid is introduced upstream of the dry pump through a nozzle in the foreline or at the inlet to the dry pump.
Provided is a dry pump comprised of a center cylinder and a side cover.
Also provided is a dry pump treated with said surface-treatment method.
During the exposure operation and alignment of the exposure system (100), only the cryo-pump (CP) (non-vibrating vacuum pump) is operated and the turbo-molecular pump (TMP)/dry pump (DP) (vibrating vacuum pump) is not operated.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Traduction Translation Traducción Übersetzung Tradução Traduzione Traducere Vertaling Tłumaczenie Mετάφραση Oversættelse Översättning Käännös Aistriúchán Traduzzjoni Prevajanje Vertimas Tõlge Preklad Fordítás Tulkojumi Превод Překlad Prijevod 翻訳 번역 翻译 Перевод