The valve means (4) is combined with the manifold (2) such that the at least one flow regulating orifice (14, 16, 17) is located inside the manifold tube (3).
The disclosed apparatus and method uses a ballast port (150a, 150b) for inserting gas into the evacuation system (130), thereby controlling the pressure in the reaction chamber (106).
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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