Nanopositioning by piezoelectric methods and devices and motors is particularly useful.
The present invention relates to a flexural nanopositioning technology with nanometer resolution two bar mechanism design.
Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.
According to the invention, the positioning drive is embodied as a micropositioning drive or nanopositioning drive (5).
Finally, the third operation mode is called the “direct positioning mode”, in which the motor can be classified as a flexure nanopositioner.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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