General formula (1) [Chemical formula 1] wherein R1 is n-butyl, isobutyl, sec-butyl or tert-butyl.

General formula (2) [Chemical formula 2] wherein R2 is n-butyl, iso-butyl, sec-butyl or tert-butyl.

Specific examples of formula (I) is n-butyl decanoate and n-butyl dodecanoate.

Butyl acetate (n-buthyl acetate, CAS No 123-86-4

0,06 % of n-butyl bromide

The alkyl group preferably is methyl, ethyl, n-propyl, i-propyl, n-butyl, sec-butyl, or tert-butyl.

0,06 % of n-butyl bromide

Me is an abbreviation for methyl, Et is ethyl, Pr is propyl, i-Pr is isopropyl, n-Bu is n-butyl, and t-Bu is tert-butyl.

A preferred olefin copolymer is an ethylene n-butyl acrylate copolymer.

More preferably, R1 is a n- alkyl or a cycloalkyl-n-alkyl, e.g. a cyclohexyl-n-alkyl, e.g. n- octyl, n-nonyl or cyclohexyl-n-butyl radical and prodrugs, isomers and pharmaceutically acceptable salts thereof.

Furthermore provided is a process for producing the same. [Chemical formula 1] [R represents methyl, ethyl, n-propyl, or n-butyl.]

A preferred aldehyde is formaldehyde and a preferred second aliphatic amine is n-butyl amine.

Preferably, reagent A is chloroacetic acid and reagent B is n-butyl glycidyl ether.

The polysilsesquioxane polymer resist is prepared by hydrolizing and polymerizing trichlorosilanes having the formula RSiCl¿3? where R is methyl, phenyl, vinyl, n-butyl, t-butyl, chlorophenyl, or chloromethylphenyl.

Preferred activator embodiments of the invention include salts of N-methyl morpholinium acetonitrile, N-butylmorpholinium acetonitrile, N-hexyl morpholinium acetonitrile, and N-octyl morpholinium acetonitrile.