An optical structure of micro spectrometer comprises an input part, an upper waveguide plate, a lower waveguide plate and a micro diffraction grating.

The micro diffraction grating is used for dividing the optical signal transmitting in the light channel into multi-spectrum components and making the multi-spectrum components emit towards an image pickup member located in the rear of the spectrometer.

They then charted the samples with the help of an electronic microsope, and carried out microdiffraction and microfluorescence analyses in the Lawrence Berkely National Laboratory in California.

The new microdiffraction instrument is part of NRC-ICPET's new state-of-the-art X-ray facility which regroups all X-ray diffraction instrumentation located within the Institute.