The measured net impedance includes the extrinsic inductive impedance and an impedance of the interface.
The second inductor exhibits a capacitive impedance for the first frequency band, and exhibits an inductive impedance for the second frequency band.
The series impedance path provides low impedance to the 1st harmonic and substantially higher, inductive impedance to higher harmonics of the power supply frequency.
Each inductive impedance (L3, L13) forms a portion of an impedance matching pad for the other oscillator circuit.
The compensation circuit (260) includes a coil (262) and a capacitor (264), and has inductive impedance.
Now the output of the inverter sees the inductive reactance of Lm in the matching network first, and all harmonics of the drive waveform see a gradually rising inductive impedance.
This inductive impedance limits the "shoot between" current that flows between paralleled inverters if their switching instants are not perfectly synchronised.
In another embodiment of the present invention, inductive impedance (304, 306, 308) can be provided in switch paths to cause a source of direct current to flow through a plasma chamber in various directions between electrodes.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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