The upper FBAR is stacked on the lower FBAR and the acoustic decoupler is located between the FBARs.
Each DSBAR has a lower film bulk acoustic resonator (FBAR) (110), an upper FBAR (120) atop the lower FBAR, and an acoustic decoupler (130) between them FBARs.
The FBAR stack comprises an FBAR (110) and a temperature-compensating element (109).
The FBAR stack comprises an FBAR (110) and has a top surface (113) remote from the substrate.
The temperature-compensated film bulk acoustic resonator, FBAR, device (100) comprises an FBAR stack (111).
The FBARs of one of the DSBARs (408) differ in electrical impedance from the FBARs of another of the DSBARs (106).
The FBAR comprises a plurality of layers having respective thicknesses.
Each of the DSBARs has a lower film bulk acoustic resonator FBAR (110), an upper FBAR (120) and an acoustic decoupler (130).
The second electrical circuit interconnects the upper FBARs (120, 460).
Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs.
The first electrical circuit interconnects the lower FBARs (110, 450).
The FACT additionally has first terminals (132, 134) electrically connected to the electrodes of one FBAR and second terminals (136, 138) electrically connected to the electrodes of the other FBAR.
The actual impedance transformation ratio depends on the ratio of the impedances of the FBARs.
A method for fabricating a Thin Film Bulk Acoustic Wave Resonator (FBAR).
The acoustic decoupler controls the coupling of acoustic energy between the FBARs.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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