Provided is a shaped-beam antenna having a multi-layered conductive element array surrounded by a dielectric ring.
Variation of the shape of the shaped beam is achieved by a beam double deflector system (18) operable only in the shaped beam mode.
shaped coverage parabolic reflector aerial
shaped coverage parabolic reflector antenna
When these images overlap, a shaped beam (56) passes through.
The projection optics are configured to expose a substrate (W) with a patterned beam.
The artifacts, which may result from cycle skipping and coherent noise, result in misalignment of the modeled and data beam sets.
The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate.
The apparatus has a substrate table (WT) for holding a substrate, a projection system (PL) for projecting the patterned beam onto a target portion of the substrate.
An immersion lithographic apparatus is configured to subject a photosensitive layer on a substrate to a patterned beam of radiation via a liquid.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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