Doping of the junction may be adjusted to include one or more delta doping layers to enhance the efficiency of the transistor.

The high doping beneath the low doped epitaxial layer can be achieved utilizing low-temperature epitaxial growth with single or multiple delta doping, or slab doping.

A trench is formed in the delta doped layer to define a gate region.

The Antimonide-based tunnel barrier may be doped with, for example, a non-uniform delta doping profile.

At this point, at least one p-type delta doping layer is formed on the barrier layer.

A group III-V material device has a delta-doped region below a channel region.

Embodiments of the invention include a laser structure having a delta doped active region for improved carrier confinement.

The threshold voltage set region may be formed by delta doping and have a thickness between Lg/5 and Lg/1.

The first type of doping is different from the second type of doping.

Each doping region is chemically separated from adjacent doping regions.

The first doping concentration is greater than the second doping concentration.

An impurity doping method and an impurity doping apparatus are disclosed which enable high-precision control in doping of a substrate with impurities.

Said reference substrate is characterised in that it has either a known dopage or no dopage.

All I've been hearing over the past couple of weeks is doping, doping, doping.

The source region (46) being more doped than the lightly doped layer.