8:00am ps1-tum1 inductively-coupled pulsed plasmas in the presence of synchronous pulsed substrate bias for advanced gate... PID includes UV damage and highly energetic ion bombardment damage....
Plasma-induced defect-site generation in si substrate and its impact on performance degradation in scaled mosfetsPlasma-induced ion-bombardment damage was studied in terms of defect sites created underneath the exposed Si surface....
Surface etching by laser-generated free radicals... The laser-generated radical etching process has a potential for major commercial impact, by eliminating ion-bombardment damage in the resulting semi-conductor device and by permitting more efficient and selective etching to be performed....
Ion tracking in photocathode rf guns... These guns, due to their design rf pulse durations of many milliseconds to continuous wave, may be more susceptible to ion bombardment damage of their cathodes than conventional rf guns, which typically use rf pulses of microsecond duration....