The gas injection funnel is disposed in a ceiling of the chamber body and opposite the substrate support pedestal.

The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel.

The gas injection funnel is offset from the central axis of the substrate support pedestal and is disposed in a region of low pressure.

Easily wetted expanded metal baffles are provided below the lowest riser extraction floor (3), between the spray elements and said riser extraction floor (3).

The gas injection funnel is disposed in a ceiling of the chamber body and opposite the substrate support pedestal.

The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel.

The injection angle (α3) of the injection hole (611C) is set smaller than the injection angle (α1) of the injection hole (611A).

The same is true for the injection direction of injection hole (611A), injection hole (611B), and injection hole (611F).

The same is true for the injection direction for injection hole (611C), injection hole (611D), and injection hole (611G).

The gas injection funnel is offset from the central axis of the substrate support pedestal and is disposed in a region of low pressure.

A fuel injection quantity is changed from an injection quantity in a stoichiometric operation to an injection quantity increasing side or an injection quantity decreasing side.

Disclosed is a spraying apparatus (1) comprising a spraying device (2) and a spray head (10).

The nozzle elements (30) have a nozzle head and a convex nozzle base, the nozzle base having an inlet opening, and the nozzle head having an outlet opening connected to the inlet opening.

Provided is an injection device and an injection method with which it is possible to easily correct misalignment between an injection nozzle and an injection hole.

The invention relates to an injection nozzle for a fuel injection system.