The second treatment chamber comprises a heat treatment chamber that provides a temperature controlled chamber, thermally insulated from the chemical treatment chamber.

The processing chamber is a vacuum processing chamber that includes a chamber body defining an interior processing region.

The treatment chamber can be designed in the form of a heat-treatment chamber (21) or a cooling chamber (21').

The second transfer chamber is connected with the first process chamber 8 and the second process chamber 9 as well as a third process chamber 13 and a fourth process chamber 14.

A chemical oxide removal (COR) processing system is presented, wherein the COR processing system includes a first treatment chamber and a second treatment chamber.

Each processing subsystem includes a process chamber and a cleaning chamber.

The apparatus comprises a processing chamber, a substrate support disposed in the processing chamber, and a lid assembly coupled to the processing chamber.

The second treatment chamber comprises a heat treatment chamber that provides a temperature controlled chamber, thermally insulated from the chemical treatment chamber.

The apparatus comprises a processing chamber, a substrate support disposed in the processing chamber, and a lid assembly coupled to the processing chamber.

In addition, at least two of the process chamber modules are vertically arranged with one process chamber module above the other process chamber module.

The substrate is transferred from the first processing chamber to a second processing chamber.

The processor has a sealed process chamber.

The apparatus includes a pre-digestion treatment chamber and an anaerobic digester chamber coupled to the pre-digestion treatment chamber.

The treatment container defines a treatment chamber.

A batch cluster tool can include a transfer chamber, an etch process chamber, and one or both of an ALD process chamber and an SAM process chamber.