The pump generally comprises a charging chamber, a regulated chamber, and a regulator passage between the charging chamber and the regulated chamber.

The charging chamber can be fluidly coupled to the supply chamber through a charging port.

Substrates are loaded from a load chamber (12) to a first deposition chamber (14) while vacuum is maintained in the first deposition chamber (14) and load chamber (12).

The second device may include a pump chamber coupled to the load chamber using a conduit such that the pump chamber is in fluid communication with the load chamber as required.

According to the invention there is a charging chamber (1) arranged upstream of the deposition chamber (16) and provided with charging means (4) for electrically charging the droplets (3).

The present apparatus includes a load chamber and an injection tube.

In one illustrative embodiment, an apparatus for regulating pressure may include a supply chamber, a control chamber, and a charging chamber.

A retaining member (20) retains the fastener in the loading chamber (7).

A load lock chamber (6) is evacuated by a pump (DP) and then filled with nitrogen N2.

The load lock chamber may have one or more cooling fluid introduction passages that extend across the chamber.

The source loading chamber communicates with a radioactive source use device (60).

The toy gun includes a barrel, a fan, a loading chamber, and a trigger.

The processing system includes a loading chamber, a transfer chamber, and a thermal processing chamber arranged together to form a cluster tool.

The magazine is removably supported in a load-in chamber of the sputtering apparatus by a chamber track assembly.

In one embodiment, substrates travel successively from the load chamber (12) to first (14) through fourth (20) deposition chambers and then to unload chamber (22).