The cooling element is also forming element OFE and consists of cooling metal ring 4, located in forming metal ring (6).

The second metal ring is disposed on an electrically insulating ring.

The heating module comprises a base tube having an outer surface on which a first metal ring, a ceramic ring, and a second metal ring are disposed.

A metal ring is disposed on the outside of the positive electrode.

The locator (50) supports the metallic annulus (32).

The metal ring prevents rotation between the concentric parts.

There is heat-insulating ring (5) between the latter and the cooling metal ring (4).

An electrode connecting with a power supply, a subsidiary metal ring and an insulating ring disposed between the electrode and the subsidiary metal ring are fixed on the supporting assembly and encircle the receiving groove.

A metallic ring (6) surrounds the top of the cylinder.

The load ring (58) mounts the metal ring (52) in the counterbore of the outer track link and provides the axial force for urging the metal seal ring (52) into axial sealing engagement against the seal lip (56).

An insulating ring (7) is provided at the top of the cylinder between the metallic ring and cylinder wall.

Then, a metal collar (30) is mounted within the core part (20b).

The protection unit consists of a metal ring, covering the edge to be protected.

The diameter of the subsidiary metal ring is smaller than the diameter of the electrode and the subsidiary metal ring is close to the wafer held on the vacuum chuck.

A metal ring (5), an anti-extrusion ring (6) and an 'O' ring seal (7) are slidably located within the body.