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électronique et électrotechnique - iate.europa.eu
Detection and depth analyses of deep levels generated by ion implantation in n- and p-type 4h-sic... After high-temperature annealing at 1700 °C, however, most DLTS peaks disappeared, and two peaks, IN3 and IN9, which may be assigned to Z1/2 and EH6/7, respectively, survive with a high concentration over the implanted atom concentration....
général - core.ac.uk - PDF: repository.kulib.kyoto-u.ac.jp
Cascade annealing of tungsten implanted with 5 kev noble gas atoms: a computer simulationThe trapping of vacancies by implanted atoms is calculated....
électronique et électrotechnique - iate.europa.eu
Point-source model for highly-accurate analytical 3d calculation of ion implanted dopant profiles... Implanted ion profile is obtained by integrals, over implanted surface, of point-source implanted profiles which are calculated by a well-tuned Monte Carlo simulation and are ...
général - core.ac.uk - PDF: kurepo.clib.kindai.ac.jp
Sio2 etch rate modification by ion implantation... It is reported that nuclear collision of implanted ion with target ions produces a relevant rearrangement of in SiO2 target network: Si and O target atoms are moved fro
Influence of irradiation spectrum and implanted ions on the amorphization of ceramics... Si3N4 exhibited intermediate behavior; irradiation with Fe{sup 2+} ions at RT produced amorphization in the implanted ion region after damage levels of {similar_to}1 dpa....
Determination of 2d implanted ion distributions using inverse radon transform methodsTwo methods are presented for the experimental determination of 2D implanted ion distribution resulting from implantations with a line source into amorphous targets....
Determination of 2d implanted ion distributions using inverse radon transform methodsTwo methods are presented for the experimental determination of 2D implanted ion distribution resulting from implantations with a line source into amorphous targets....

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