Sio2 etch rate modification by ion implantation... It is reported that nuclear collision of implanted ion with target ions produces a relevant rearrangement of in SiO2 target network: Si and O target atoms are moved fro
Influence of irradiation spectrum and implanted ions on the amorphization of ceramics... Si3N4 exhibited intermediate behavior; irradiation with Fe{sup 2+} ions at RT produced amorphization in the implanted ion region after damage levels of {similar_to}1 dpa....
Determination of 2d implanted ion distributions using inverse radon transform methodsTwo methods are presented for the experimental determination of 2D implanted ion distribution resulting from implantations with a line source into amorphous targets....
Determination of 2d implanted ion distributions using inverse radon transform methodsTwo methods are presented for the experimental determination of 2D implanted ion distribution resulting from implantations with a line source into amorphous targets....