The sensor consists of a counter electrode (40), a sensing electrode (32) and a compensating electrode (36).

The silicon spherical surface electrodes comprise a drive electrode (4), a force balancing electrode (5), a signal detecting electrode (6), and a shielding electrode (7).

The analyzer is provided with a vessel, an inlet, a cooling unit, an atomizing electrode, a counter electrode unit, an intermediate electrode, a liquid detecting unit, and a detecting electrode.

The electrode arrangement includes a sensing electrode and a shielding electrode.

Each node includes a drive electrode that is spatially separated from a sense electrode.

A drive electrode, a monitor electrode and a detection electrode are formed from one support beam to the other through the weight.

A first neutral electrode (B) is provided near the first detecting electrode (A), and A second neutral electrode (D) is provided near the second detecting electrode (C).

The first electrode comprises a large area electrode and the second electrode comprises a small area electrode.

Either each pixel electrode or each counter electrode is a transparent electrode formed around the other electrode in a area not overlapping at least with the other electrode.

Said additional electrode can be used as a reference electrode or as a polarization electrode.

The first electrode (30) or the second electrode is shared as the source electrode (50) or the drain electrode (60).

The detector (20) comprises a focusser electrode (21), a repeller electrode (22), an extractor electrode (23), a detector electrode (24), and a reflector electrode (25).

The first electrode is a base electrode that acts as the hot electrode.

The electrodes include a working electrode, a reference electrode, and a counter electrode.

The second electrode is upstream from the first electrode, and the third electrode is downstream from the first electrode.