In another embodiment, a central blocker plate and a peripheral blocker plate are disposed between a backing plate and a showerhead.

The second shutter plate (5b) is pivotally attached to the first shutter plate (5a) by a supporting shaft (62a) inserted into a shaft hole (54) provided in the first shutter plate (5a).

As a result, the second shutter plate is less likely to come off from the supporting shaft of the first shutter plate even if the cartridge is subjected to impact.

In one embodiment, a blocker plate is disposed between a backing plate and a showerhead.

In another embodiment, the blocker plate has a non-planar surface contour.

In another embodiment, a regional blocker plate is disposed between a backing plate and a showerhead.

In one embodiment, the distance between the blocker plate and the showerhead is adjustable.

The movable part has an operating arm (9) for an actuator (5) and at the end facing towards the fixed part has a closure plate (10) having a scraper projection (11).

A movable first shutter plate within the first sublimation compartment is configured to control the flow rate of the first source material vapors therethrough.

A stopper plate (21) limiting the movement of a motor output shaft may be utilized as the metal member (22) to increase the bearing holding performance and the durability of the metal member without increasing the number of parts.