The plane orientation of the front plane of a chip (2a) is at -8° or more but not more than +8° from the (110) crystal plane of silicon.
Coupled to the detector (80) is a resolution enhancer that generates an in-crystal plane displacement correction value for each coordinate value registered by the detector (80).
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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