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magnétron en régime pulsé

pulsed magnetron

électronique et électrotechnique - iate.europa.eu

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Structure and optical-mechanical properties of the zr-y-o coatings deposited by pulse magnetron sputtering on optical glassThe results of the research of the phase composition and the mechanical properties of the coatings on the basis of the Zr-Y-O system produced by pulsed magnetron sputtering on the K208 glass substrates are presented in this paper....

général - core.ac.uk - PDF: vital.lib.tsu.ru

Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes...modulation frequency on the properties of films synthesized using a unique pulsed power supply combined with a standard unbalanced circular magnetron was conducted in the process of pulsed magnetron sputtering (PMS)....

PDF: doaj.org

Studies of the temporal behaviour of a pulsed magnetron deposition dischargeA mid-frequency asymmetric-bipolar pulsed magnetron sputtering system in the frequency range from 100 to 300 kHz has been investigated by a combined application of a Langmuir double probe and optical emission spectroscopy....

PDF: www.loc.gov

The target material influence on the current pulse during high power pulsed magnetron sputteringThe current-time characteristic during high power pulsed magnetron sputtering is measured under identical conditions for seventeen different target materials....

PDF: doaj.org

Advanced coatings through pulsed magnetron sputteringPulsed magnetron sputtering (PMS) has becomeestablished as the process of choice for the depositionof dielectric materials for many applications....

PDF: core.ac.uk