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lithographie computationnelle

computational lithography

électronique et électrotechnique - acta.es

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Process window enhancement using advanced ret techniques for 20nm contact layer... Advanced computational lithography techniques including Source Mask Optimization (SMO), thick mask modeling (M3D), Model Based Sub Resolution Assist Features (MB-SRAF) and Process Window...

général - core.ac.uk - PDF: proceedings.spiedigitallibrary.org

Algorithms for the computation of continuous transforms of rectilinear polygons from ic layouts... This makes those continuous transforms particularly suitable for applications in Computational Lithography (CL) where speed and memory are critical requirements....

PDF: infoscience.epfl.ch

Algorithms for the computation of continuous transforms . . .... This makes those continuous transforms particularly suitable for applications in Computational Lithography (CL) where speed and memory are critical requirements....

PDF: citeseerx.ist.psu.edu

Reduced basis method for computational lithographyA bottleneck for computational lithography and optical metrology are longcomputational times for near field simulations....

PDF: arxiv.org

Accelerating dfm electronic data process using the cell be microprocessor architecture.Abstract—The demands of computational lithography are increasing as Moore’s Law drives IC generations from 65nm through 45nm to 32nm and beyond....

PDF: citeseerx.ist.psu.edu