The inner conductor (12) of the coaxial transmission line (14) may extend beyond the radial transmission line (15)to form a monopole antenna (10).
Radial transmission line based plasma sources for etch chambers are described.
In order to provide the decoupling, a radial transmission line (15; 36, 37, 38; 48, 51, 52) is disposed at the base of the antenna (10, 35, 50) and concentric with the coaxial transmission line (14) used to excite the antenna.
The radial transmission line (15; 36, 37, 38; 48; 51, 52) includes an upper (16) and a lower electrically conductive plate (17), each having a small central opening (18).
A parallel plate radial transmission line (14) having parallel plate spacing of less than μ/2 and which utilizes a specific higher order mode, preferably the first higher order circumferential mode.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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