R5 and R6 are each independently a monovalent linear aliphatic hydrocarbon group or alicyclic hydrocarbon group.
Thus, a fine pattern necessary for semiconductor element production can be formed. (1) (In the formula, Z is an alicyclic hydrocarbon group having a lactone structure.)
In one embodiment of the invention, the core layer includes a polymerized alicyclic hydrocarbon such as polyterpene.
In formula (1), R?1 and R2¿ may form an alicyclic hydrocarbon in cooperation with the adjacent carbon atom).
General formula (1) is CH2=C(R1)COOR2 (in formula (1), R1 is a hydrogen atom or a methyl group, and R2 is an alicyclic hydrocarbon group having an alicyclic structure).
The alicyclic hydrocarbon may contain a heteroatom.)
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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