guiding by cross wire viewing

guiding by cross wire viewing

guiding by cross wire viewing

electro-optical image correlator guidance system

The projection optical system (PL) projects the image of a reticle (R) illuminated by an illumination optical apparatus (IS) onto a wafer (W).

The optical block (32) reduces changes in distortion caused by heat transferred from the reticle (2).

An optical sight is provided and may include an optical element and a reticle displayed on the optical element.

The incidence angle is determined by the numerical aperture of the optical guide element.

The reduced image of the master reticle is transferred by image stitching by exposure by using an optical projection aligner.

Provided are: a reticle unit which is capable of assuring good visibility of a reticle regardless of the background; and an optical device which comprises the reticle unit.

Where the optical instrument is a larger telescope, an additional cross hair allows for alignment of the telemicroscope.

An optical module is provided which can be optically aligned with the optical printed circuit board or another optical component through guide pins inserted into guide holes.

A tracking servo controls a tracking servo of the optical pick-up.

A reticle (R) is irradiated with an ArF excimer laser beam to transfer a pattern on the reticle (R) onto a wafer (W) through a projection optical system (PL).

A reticle projector (50) is disposed orthogonal to the optical axis and provides a collimated reticle image, the reticle image providing an aiming point for the weapon.