Furthermore, in the case of changing the scanning direction of the electron beam in accordance with the pattern direction, errors of the scanning direction and the scanning position are corrected.
A sensor (11) reads information of the hand by scanning the hand in a scanning direction (D1).
The scan path is defined by a trajectory in a scanning direction of an exposure field of the lithographic apparatus.
The scanning mechanism scans an object across an array of focused light spots in a scanning direction.
The scanning direction may be an actual direction of movement of the scanning head or it may be a direction perpendicular to an orientation of an image projected onto a workpiece.
The image may have a resolution in the scan direction that is at least 90 % as high as in one direction, and in some cases two directions, orthogonal to the scan direction.
The MEMS mirror (30) performs one frame of scans during the interval when the scan in the subsidiary scan direction drives in one direction.
The first region and the second region are arranged at a predetermined interval along the non-scan direction intersecting the scan direction.
The laser beam is scanned across the receiving surface in a scan direction (66) perpendicular to a process direction (46).
The specimen is dynamically tiltable about a scan direction during a scan to maintain focus along the length of each scan line as the scan proceeds.
In a direction perpendicular to the scan direction, a discrete line is drawn.
By this means, this scanning exposure device using a microlens array is capable of preventing exposure unevenness even in the direction perpendicular to the scan direction.
An aperture disposed between the reflective surface and the target surface has a non-transmissive portion with a width in a direction perpendicular to the laser scan direction that varies over the scan direction.
An imaging system controls the positioning apparatus, source, and detector to acquire images along a primary scan direction with offsets in a secondary scan direction.
An encoder scale is arranged along the main scan direction.
The light beams are simultaneously applied to two locations of the sample different in scan direction by means of a galvanometer mirror (18), and the sample is scanned in the scan direction.
The plurality of pixels can include a first pixel having a first size along the scan direction and a second pixel having a second size along the scan direction.
A further logic circuit (132, 134) provides a signal indicative of the direction of scan.
Means for differentially varying the focussing in the scan direction (53, 55) and offset at the beams in the cross-scan direction (49, 51) are also provided.
An adjustable collimator varies the width of the imaging beam in the scan direction.
Requêtes fréquentes français :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
Requêtes fréquentes anglais :1-200, -1k, -2k, -3k, -4k, -5k, -7k, -10k, -20k, -40k, -100k, -200k, -500k, -1000k,
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