The heater (28) is divided into an upper part heating block (32), an intermediate part heating block (34), and a lower part heating block (36).

The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base.

The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base.

A heating block (31) is disposed on the second heating apparatus, and a return passage (32) is disposed in the heating block.

An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface.

  The folding plate (332) is intruded into the groove of the heat block (330) and partially bends, in V-shape, the film conveyed along the heater block (330).

The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation.

Arranged in the heating block is an electric heating element, which has external heating surfaces that are insulated from electrical voltage.

An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface.

In an embodiment the heating block is substantially entirely constructed of graphite.

Instead, wrap the heat pack or heating pad in a cloth first.

The feed paths for the various plastic melts change thanks to the structure in several parts of the hot runner block (23a-c) and to the controlled expansion movements of the hot runner block (23a-c) that are identical for all cavities.

The heater assembly includes two Peltier thermoelectric modules in thermal communication with a plurality of heat sinks.

A base is arranged to adjoin at least a portion of the second surface of the heating block.

Formed in the heating block is at least one first duct and one second duct for heating and conducting the water.